JPS56164552U - - Google Patents

Info

Publication number
JPS56164552U
JPS56164552U JP6402980U JP6402980U JPS56164552U JP S56164552 U JPS56164552 U JP S56164552U JP 6402980 U JP6402980 U JP 6402980U JP 6402980 U JP6402980 U JP 6402980U JP S56164552 U JPS56164552 U JP S56164552U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6402980U
Other languages
Japanese (ja)
Other versions
JPS6138183Y2 (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1980064029U priority Critical patent/JPS6138183Y2/ja
Publication of JPS56164552U publication Critical patent/JPS56164552U/ja
Application granted granted Critical
Publication of JPS6138183Y2 publication Critical patent/JPS6138183Y2/ja
Expired legal-status Critical Current

Links

JP1980064029U 1980-05-10 1980-05-10 Expired JPS6138183Y2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1980064029U JPS6138183Y2 (cg-RX-API-DMAC7.html) 1980-05-10 1980-05-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1980064029U JPS6138183Y2 (cg-RX-API-DMAC7.html) 1980-05-10 1980-05-10

Publications (2)

Publication Number Publication Date
JPS56164552U true JPS56164552U (cg-RX-API-DMAC7.html) 1981-12-07
JPS6138183Y2 JPS6138183Y2 (cg-RX-API-DMAC7.html) 1986-11-05

Family

ID=29658227

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1980064029U Expired JPS6138183Y2 (cg-RX-API-DMAC7.html) 1980-05-10 1980-05-10

Country Status (1)

Country Link
JP (1) JPS6138183Y2 (cg-RX-API-DMAC7.html)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5160448A (cg-RX-API-DMAC7.html) * 1974-11-22 1976-05-26 Hitachi Ltd
JPS5351976A (en) * 1976-10-22 1978-05-11 Hitachi Ltd Wafer feeder

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5160448A (cg-RX-API-DMAC7.html) * 1974-11-22 1976-05-26 Hitachi Ltd
JPS5351976A (en) * 1976-10-22 1978-05-11 Hitachi Ltd Wafer feeder

Also Published As

Publication number Publication date
JPS6138183Y2 (cg-RX-API-DMAC7.html) 1986-11-05

Similar Documents

Publication Publication Date Title
FR2487432B1 (cg-RX-API-DMAC7.html)
IN156220B (cg-RX-API-DMAC7.html)
FR2478982B1 (cg-RX-API-DMAC7.html)
GR72764B (cg-RX-API-DMAC7.html)
FR2497087B1 (cg-RX-API-DMAC7.html)
FR2491215B1 (cg-RX-API-DMAC7.html)
FR2489715B1 (cg-RX-API-DMAC7.html)
FR2490835B1 (cg-RX-API-DMAC7.html)
FR2482357B1 (cg-RX-API-DMAC7.html)
FR2481798B1 (cg-RX-API-DMAC7.html)
FR2496390B1 (cg-RX-API-DMAC7.html)
FR2474710B2 (cg-RX-API-DMAC7.html)
FR2488624B1 (cg-RX-API-DMAC7.html)
FR2488939B1 (cg-RX-API-DMAC7.html)
FR2489306B1 (cg-RX-API-DMAC7.html)
FR2496724B3 (cg-RX-API-DMAC7.html)
FR2487347B1 (cg-RX-API-DMAC7.html)
FR2491578B3 (cg-RX-API-DMAC7.html)
FR2495242B1 (cg-RX-API-DMAC7.html)
FR2475643B1 (cg-RX-API-DMAC7.html)
FR2490352B1 (cg-RX-API-DMAC7.html)
FR2479844B1 (cg-RX-API-DMAC7.html)
JPS56104521U (cg-RX-API-DMAC7.html)
GR73695B (cg-RX-API-DMAC7.html)
FR2477524B1 (cg-RX-API-DMAC7.html)