JPS5616104Y2 - - Google Patents
Info
- Publication number
- JPS5616104Y2 JPS5616104Y2 JP12500578U JP12500578U JPS5616104Y2 JP S5616104 Y2 JPS5616104 Y2 JP S5616104Y2 JP 12500578 U JP12500578 U JP 12500578U JP 12500578 U JP12500578 U JP 12500578U JP S5616104 Y2 JPS5616104 Y2 JP S5616104Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Cabinets, Racks, Or The Like Of Rigid Construction (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12500578U JPS5616104Y2 (en) | 1978-09-11 | 1978-09-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12500578U JPS5616104Y2 (en) | 1978-09-11 | 1978-09-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5540760U JPS5540760U (en) | 1980-03-15 |
| JPS5616104Y2 true JPS5616104Y2 (en) | 1981-04-15 |
Family
ID=29085523
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12500578U Expired JPS5616104Y2 (en) | 1978-09-11 | 1978-09-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5616104Y2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0652700B2 (en) * | 1981-09-26 | 1994-07-06 | 富士通株式会社 | Electron beam exposure method in electron beam exposure apparatus |
-
1978
- 1978-09-11 JP JP12500578U patent/JPS5616104Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5540760U (en) | 1980-03-15 |