JPS56159182U - - Google Patents
Info
- Publication number
- JPS56159182U JPS56159182U JP5610080U JP5610080U JPS56159182U JP S56159182 U JPS56159182 U JP S56159182U JP 5610080 U JP5610080 U JP 5610080U JP 5610080 U JP5610080 U JP 5610080U JP S56159182 U JPS56159182 U JP S56159182U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5610080U JPS56159182U (en) | 1980-04-24 | 1980-04-24 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5610080U JPS56159182U (en) | 1980-04-24 | 1980-04-24 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS56159182U true JPS56159182U (en) | 1981-11-27 |
Family
ID=29650712
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5610080U Pending JPS56159182U (en) | 1980-04-24 | 1980-04-24 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56159182U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63298171A (en) * | 1987-05-29 | 1988-12-05 | Tokyo Electron Ltd | Wafer prober |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5036090A (en) * | 1973-08-03 | 1975-04-04 | ||
JPS50104632A (en) * | 1974-01-19 | 1975-08-18 |
-
1980
- 1980-04-24 JP JP5610080U patent/JPS56159182U/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5036090A (en) * | 1973-08-03 | 1975-04-04 | ||
JPS50104632A (en) * | 1974-01-19 | 1975-08-18 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63298171A (en) * | 1987-05-29 | 1988-12-05 | Tokyo Electron Ltd | Wafer prober |