JPS56157020A - Jig for manufacture of semiconductor material - Google Patents

Jig for manufacture of semiconductor material

Info

Publication number
JPS56157020A
JPS56157020A JP6087080A JP6087080A JPS56157020A JP S56157020 A JPS56157020 A JP S56157020A JP 6087080 A JP6087080 A JP 6087080A JP 6087080 A JP6087080 A JP 6087080A JP S56157020 A JPS56157020 A JP S56157020A
Authority
JP
Japan
Prior art keywords
solution
reservoir
supporting base
semiconductor material
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6087080A
Other languages
Japanese (ja)
Inventor
Kazuo Nakajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP6087080A priority Critical patent/JPS56157020A/en
Publication of JPS56157020A publication Critical patent/JPS56157020A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B19/00—Liquid-phase epitaxial-layer growth
    • C30B19/06—Reaction chambers; Boats for supporting the melt; Substrate holders
    • C30B19/063—Sliding boat system

Abstract

PURPOSE:To uniformalize the composition of a subdivided solution by a method wherein the supporting base, having a plurality of concaved sections where a semiconductor solution is filled in, and a stirring mechanism are provided. The stirring mechanism is formed in a solution reservoir which is shifted by sliding on the supporting base. CONSTITUTION:The mechanism having the following functions is provided. The solution reservoir, consisting of carbon plates 12A, 12B and an airtight cover 16 with small holes on it, is installed in such manner that it slides on the supporting base 11 having a plurality of concaved sections 14's where semiconductor solution will be filled in and a solution 18 inside the solution reservoir can be stirred up. Through this mechanism, the solution can be mixed up uniformly and the crystal of the semiconductor material having the desired composition can be obtained even when there is a large quantity of the solution in the reservoir.
JP6087080A 1980-05-08 1980-05-08 Jig for manufacture of semiconductor material Pending JPS56157020A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6087080A JPS56157020A (en) 1980-05-08 1980-05-08 Jig for manufacture of semiconductor material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6087080A JPS56157020A (en) 1980-05-08 1980-05-08 Jig for manufacture of semiconductor material

Publications (1)

Publication Number Publication Date
JPS56157020A true JPS56157020A (en) 1981-12-04

Family

ID=13154845

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6087080A Pending JPS56157020A (en) 1980-05-08 1980-05-08 Jig for manufacture of semiconductor material

Country Status (1)

Country Link
JP (1) JPS56157020A (en)

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