JPS56156648A - Follow cathode discharger - Google Patents

Follow cathode discharger

Info

Publication number
JPS56156648A
JPS56156648A JP876781A JP876781A JPS56156648A JP S56156648 A JPS56156648 A JP S56156648A JP 876781 A JP876781 A JP 876781A JP 876781 A JP876781 A JP 876781A JP S56156648 A JPS56156648 A JP S56156648A
Authority
JP
Japan
Prior art keywords
discharge
hollow cathode
cathode
heater
follow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP876781A
Other languages
Japanese (ja)
Inventor
Osamu Morimiya
Setsuo Suzuki
Shigeki Kadoma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP876781A priority Critical patent/JPS56156648A/en
Publication of JPS56156648A publication Critical patent/JPS56156648A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Solid Thermionic Cathode (AREA)

Abstract

PURPOSE: To facilitate the start of discharge between a hollow cathode and an anode, by arranging a heater or a starting electrode in a hollow cathode.
CONSTITUTION: When throwing in a switch 8 at the start of discharge and applying high voltage between a hollow cathode 1 and a heater 7, grow discharge produced between the cathode 1 and the heater 7. By said discharge the inner wall of said hollow cathode 1 is sufficiently heated. Consequently the follow cathode arc discharge between the hollow cathode 1 and the anode 2 is started easily. Once started said discharge is maintained even if the switch 8 is opened.
COPYRIGHT: (C)1981,JPO&Japio
JP876781A 1981-01-23 1981-01-23 Follow cathode discharger Pending JPS56156648A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP876781A JPS56156648A (en) 1981-01-23 1981-01-23 Follow cathode discharger

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP876781A JPS56156648A (en) 1981-01-23 1981-01-23 Follow cathode discharger

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP54136626A Division JPS6011417B2 (en) 1979-10-23 1979-10-23 Hollow cathode discharge device

Publications (1)

Publication Number Publication Date
JPS56156648A true JPS56156648A (en) 1981-12-03

Family

ID=11702051

Family Applications (1)

Application Number Title Priority Date Filing Date
JP876781A Pending JPS56156648A (en) 1981-01-23 1981-01-23 Follow cathode discharger

Country Status (1)

Country Link
JP (1) JPS56156648A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01116070A (en) * 1987-10-29 1989-05-09 Internatl Business Mach Corp <Ibm> Sputtering apparatus
KR100845326B1 (en) 2007-01-22 2008-07-10 한국전기연구원 Hollow cathode discharge gun

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01116070A (en) * 1987-10-29 1989-05-09 Internatl Business Mach Corp <Ibm> Sputtering apparatus
KR100845326B1 (en) 2007-01-22 2008-07-10 한국전기연구원 Hollow cathode discharge gun

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