JPS56155446U - - Google Patents
Info
- Publication number
- JPS56155446U JPS56155446U JP5193480U JP5193480U JPS56155446U JP S56155446 U JPS56155446 U JP S56155446U JP 5193480 U JP5193480 U JP 5193480U JP 5193480 U JP5193480 U JP 5193480U JP S56155446 U JPS56155446 U JP S56155446U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5193480U JPS6141229Y2 (https=) | 1980-04-18 | 1980-04-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5193480U JPS6141229Y2 (https=) | 1980-04-18 | 1980-04-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56155446U true JPS56155446U (https=) | 1981-11-20 |
| JPS6141229Y2 JPS6141229Y2 (https=) | 1986-11-25 |
Family
ID=29646815
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5193480U Expired JPS6141229Y2 (https=) | 1980-04-18 | 1980-04-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6141229Y2 (https=) |
-
1980
- 1980-04-18 JP JP5193480U patent/JPS6141229Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6141229Y2 (https=) | 1986-11-25 |