JPS5615513Y2 - - Google Patents

Info

Publication number
JPS5615513Y2
JPS5615513Y2 JP6634276U JP6634276U JPS5615513Y2 JP S5615513 Y2 JPS5615513 Y2 JP S5615513Y2 JP 6634276 U JP6634276 U JP 6634276U JP 6634276 U JP6634276 U JP 6634276U JP S5615513 Y2 JPS5615513 Y2 JP S5615513Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6634276U
Other languages
Japanese (ja)
Other versions
JPS52157035U (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6634276U priority Critical patent/JPS5615513Y2/ja
Publication of JPS52157035U publication Critical patent/JPS52157035U/ja
Application granted granted Critical
Publication of JPS5615513Y2 publication Critical patent/JPS5615513Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Resistance Heating (AREA)
  • Furnace Details (AREA)
JP6634276U 1976-05-24 1976-05-24 Expired JPS5615513Y2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6634276U JPS5615513Y2 (https=) 1976-05-24 1976-05-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6634276U JPS5615513Y2 (https=) 1976-05-24 1976-05-24

Publications (2)

Publication Number Publication Date
JPS52157035U JPS52157035U (https=) 1977-11-29
JPS5615513Y2 true JPS5615513Y2 (https=) 1981-04-10

Family

ID=28532150

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6634276U Expired JPS5615513Y2 (https=) 1976-05-24 1976-05-24

Country Status (1)

Country Link
JP (1) JPS5615513Y2 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5993272B2 (ja) 2012-10-18 2016-09-14 東京エレクトロン株式会社 断熱壁体の製造方法

Also Published As

Publication number Publication date
JPS52157035U (https=) 1977-11-29

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