JPS5615513Y2 - - Google Patents

Info

Publication number
JPS5615513Y2
JPS5615513Y2 JP6634276U JP6634276U JPS5615513Y2 JP S5615513 Y2 JPS5615513 Y2 JP S5615513Y2 JP 6634276 U JP6634276 U JP 6634276U JP 6634276 U JP6634276 U JP 6634276U JP S5615513 Y2 JPS5615513 Y2 JP S5615513Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6634276U
Other languages
Japanese (ja)
Other versions
JPS52157035U (el
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6634276U priority Critical patent/JPS5615513Y2/ja
Publication of JPS52157035U publication Critical patent/JPS52157035U/ja
Application granted granted Critical
Publication of JPS5615513Y2 publication Critical patent/JPS5615513Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Resistance Heating (AREA)
  • Furnace Details (AREA)
JP6634276U 1976-05-24 1976-05-24 Expired JPS5615513Y2 (el)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6634276U JPS5615513Y2 (el) 1976-05-24 1976-05-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6634276U JPS5615513Y2 (el) 1976-05-24 1976-05-24

Publications (2)

Publication Number Publication Date
JPS52157035U JPS52157035U (el) 1977-11-29
JPS5615513Y2 true JPS5615513Y2 (el) 1981-04-10

Family

ID=28532150

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6634276U Expired JPS5615513Y2 (el) 1976-05-24 1976-05-24

Country Status (1)

Country Link
JP (1) JPS5615513Y2 (el)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5993272B2 (ja) 2012-10-18 2016-09-14 東京エレクトロン株式会社 断熱壁体の製造方法

Also Published As

Publication number Publication date
JPS52157035U (el) 1977-11-29

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