JPS56154149U - - Google Patents

Info

Publication number
JPS56154149U
JPS56154149U JP1980050770U JP5077080U JPS56154149U JP S56154149 U JPS56154149 U JP S56154149U JP 1980050770 U JP1980050770 U JP 1980050770U JP 5077080 U JP5077080 U JP 5077080U JP S56154149 U JPS56154149 U JP S56154149U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1980050770U
Other languages
Japanese (ja)
Other versions
JPS6138181Y2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1980050770U priority Critical patent/JPS6138181Y2/ja
Publication of JPS56154149U publication Critical patent/JPS56154149U/ja
Application granted granted Critical
Publication of JPS6138181Y2 publication Critical patent/JPS6138181Y2/ja
Expired legal-status Critical Current

Links

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  • Jigs For Machine Tools (AREA)
  • Coating Apparatus (AREA)
JP1980050770U 1980-04-15 1980-04-15 Expired JPS6138181Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1980050770U JPS6138181Y2 (cs) 1980-04-15 1980-04-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1980050770U JPS6138181Y2 (cs) 1980-04-15 1980-04-15

Publications (2)

Publication Number Publication Date
JPS56154149U true JPS56154149U (cs) 1981-11-18
JPS6138181Y2 JPS6138181Y2 (cs) 1986-11-05

Family

ID=29645698

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1980050770U Expired JPS6138181Y2 (cs) 1980-04-15 1980-04-15

Country Status (1)

Country Link
JP (1) JPS6138181Y2 (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01135439A (ja) * 1987-11-18 1989-05-29 Mitsubishi Monsanto Chem Co ウェハー製造方法、及びその製造装置
JPH0499829U (cs) * 1991-02-05 1992-08-28

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01135439A (ja) * 1987-11-18 1989-05-29 Mitsubishi Monsanto Chem Co ウェハー製造方法、及びその製造装置
JPH0499829U (cs) * 1991-02-05 1992-08-28

Also Published As

Publication number Publication date
JPS6138181Y2 (cs) 1986-11-05

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