JPS56151364U - - Google Patents
Info
- Publication number
- JPS56151364U JPS56151364U JP4851980U JP4851980U JPS56151364U JP S56151364 U JPS56151364 U JP S56151364U JP 4851980 U JP4851980 U JP 4851980U JP 4851980 U JP4851980 U JP 4851980U JP S56151364 U JPS56151364 U JP S56151364U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4851980U JPS56151364U (cs) | 1980-04-10 | 1980-04-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4851980U JPS56151364U (cs) | 1980-04-10 | 1980-04-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS56151364U true JPS56151364U (cs) | 1981-11-13 |
Family
ID=29643520
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4851980U Pending JPS56151364U (cs) | 1980-04-10 | 1980-04-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56151364U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58101874U (ja) * | 1981-12-28 | 1983-07-11 | 富士通株式会社 | マグネトロン式スパツタ装置 |
-
1980
- 1980-04-10 JP JP4851980U patent/JPS56151364U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58101874U (ja) * | 1981-12-28 | 1983-07-11 | 富士通株式会社 | マグネトロン式スパツタ装置 |