JPS56148811U - - Google Patents

Info

Publication number
JPS56148811U
JPS56148811U JP4214381U JP4214381U JPS56148811U JP S56148811 U JPS56148811 U JP S56148811U JP 4214381 U JP4214381 U JP 4214381U JP 4214381 U JP4214381 U JP 4214381U JP S56148811 U JPS56148811 U JP S56148811U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4214381U
Other languages
Japanese (ja)
Other versions
JPS6010022Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1981042143U priority Critical patent/JPS6010022Y2/ja
Publication of JPS56148811U publication Critical patent/JPS56148811U/ja
Application granted granted Critical
Publication of JPS6010022Y2 publication Critical patent/JPS6010022Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Non-Insulated Conductors (AREA)
  • Manufacturing Of Electric Cables (AREA)
JP1981042143U 1981-03-24 1981-03-24 酸化物半導体膜製造装置 Expired JPS6010022Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981042143U JPS6010022Y2 (ja) 1981-03-24 1981-03-24 酸化物半導体膜製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981042143U JPS6010022Y2 (ja) 1981-03-24 1981-03-24 酸化物半導体膜製造装置

Publications (2)

Publication Number Publication Date
JPS56148811U true JPS56148811U (enrdf_load_html_response) 1981-11-09
JPS6010022Y2 JPS6010022Y2 (ja) 1985-04-06

Family

ID=29637527

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981042143U Expired JPS6010022Y2 (ja) 1981-03-24 1981-03-24 酸化物半導体膜製造装置

Country Status (1)

Country Link
JP (1) JPS6010022Y2 (enrdf_load_html_response)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4995196A (enrdf_load_html_response) * 1972-11-29 1974-09-10

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4995196A (enrdf_load_html_response) * 1972-11-29 1974-09-10

Also Published As

Publication number Publication date
JPS6010022Y2 (ja) 1985-04-06

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