JPS56146203A - Method of manufacturing oxide semiconductor for thermistor - Google Patents

Method of manufacturing oxide semiconductor for thermistor

Info

Publication number
JPS56146203A
JPS56146203A JP4937280A JP4937280A JPS56146203A JP S56146203 A JPS56146203 A JP S56146203A JP 4937280 A JP4937280 A JP 4937280A JP 4937280 A JP4937280 A JP 4937280A JP S56146203 A JPS56146203 A JP S56146203A
Authority
JP
Japan
Prior art keywords
thermistor
oxide semiconductor
manufacturing oxide
manufacturing
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4937280A
Other languages
Japanese (ja)
Other versions
JPS6022482B2 (en
Inventor
Takuoki Hata
Takayuki Kuroda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP4937280A priority Critical patent/JPS6022482B2/en
Publication of JPS56146203A publication Critical patent/JPS56146203A/en
Publication of JPS6022482B2 publication Critical patent/JPS6022482B2/en
Expired legal-status Critical Current

Links

JP4937280A 1980-04-14 1980-04-14 Manufacturing method of oxide semiconductor for thermistor Expired JPS6022482B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4937280A JPS6022482B2 (en) 1980-04-14 1980-04-14 Manufacturing method of oxide semiconductor for thermistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4937280A JPS6022482B2 (en) 1980-04-14 1980-04-14 Manufacturing method of oxide semiconductor for thermistor

Publications (2)

Publication Number Publication Date
JPS56146203A true JPS56146203A (en) 1981-11-13
JPS6022482B2 JPS6022482B2 (en) 1985-06-03

Family

ID=12829192

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4937280A Expired JPS6022482B2 (en) 1980-04-14 1980-04-14 Manufacturing method of oxide semiconductor for thermistor

Country Status (1)

Country Link
JP (1) JPS6022482B2 (en)

Also Published As

Publication number Publication date
JPS6022482B2 (en) 1985-06-03

Similar Documents

Publication Publication Date Title
JPS56152272A (en) Method of manufacturing semiconductor device
JPS56140671A (en) Method of manufacturing semiconductor device
JPS5694777A (en) Method of manufacturing semiconductor
JPS5778136A (en) Method of fabricating semiconductor device
JPS56144545A (en) Method of manufacturing semiconductor device
ZA818560B (en) Method for fabricating improved complementary metal oxide semiconductor devices
JPS56144543A (en) Method of manufacturing semiconductor device
JPS56140668A (en) Method of manufacturing semiconductor device
JPS5650563A (en) Method of manufacturing semiconductor device
JPS5772383A (en) Method of fabricating semiconductor device
JPS56114352A (en) Method of manufacturing semiconductor device
GB2128401B (en) Method of manufacturing semiconductor device
JPS5696868A (en) Method of manufacturing semiconductor device
GB2087147B (en) Methods of manufacturing semiconductor devices
JPS5693366A (en) Method of manufacturing semiconductor device
JPS5658246A (en) Method of manufacturing semiconductor device
JPS55160425A (en) Method of manufacturing multiistage semiconductor device
JPS56160007A (en) Method of manufacturing oxide semiconductor for thermistor
JPS55134981A (en) Method of manufacturing semiconductor device
JPS5688318A (en) Method of manufacturing semiconductor device
JPS56114859A (en) Manufacture of oxide semiconductor for thermistor
JPS5728342A (en) Method of forming insular semiconductor region
YU108981A (en) Method of making semiconductor devices
JPS56146203A (en) Method of manufacturing oxide semiconductor for thermistor
JPS5667974A (en) Method of manufacturing semiconductor device