JPS5614367U - - Google Patents
Info
- Publication number
- JPS5614367U JPS5614367U JP9665979U JP9665979U JPS5614367U JP S5614367 U JPS5614367 U JP S5614367U JP 9665979 U JP9665979 U JP 9665979U JP 9665979 U JP9665979 U JP 9665979U JP S5614367 U JPS5614367 U JP S5614367U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9665979U JPS5614367U (ja) | 1979-07-12 | 1979-07-12 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9665979U JPS5614367U (ja) | 1979-07-12 | 1979-07-12 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5614367U true JPS5614367U (ja) | 1981-02-06 |
Family
ID=29329472
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9665979U Pending JPS5614367U (ja) | 1979-07-12 | 1979-07-12 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5614367U (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0892764A (ja) * | 1994-09-22 | 1996-04-09 | Nec Kyushu Ltd | スパッタ装置 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS501070B1 (ja) * | 1969-12-04 | 1975-01-14 | ||
JPS5220319B2 (ja) * | 1974-06-19 | 1977-06-02 |
-
1979
- 1979-07-12 JP JP9665979U patent/JPS5614367U/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS501070B1 (ja) * | 1969-12-04 | 1975-01-14 | ||
JPS5220319B2 (ja) * | 1974-06-19 | 1977-06-02 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0892764A (ja) * | 1994-09-22 | 1996-04-09 | Nec Kyushu Ltd | スパッタ装置 |