JPS5614367U - - Google Patents

Info

Publication number
JPS5614367U
JPS5614367U JP9665979U JP9665979U JPS5614367U JP S5614367 U JPS5614367 U JP S5614367U JP 9665979 U JP9665979 U JP 9665979U JP 9665979 U JP9665979 U JP 9665979U JP S5614367 U JPS5614367 U JP S5614367U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9665979U
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9665979U priority Critical patent/JPS5614367U/ja
Publication of JPS5614367U publication Critical patent/JPS5614367U/ja
Pending legal-status Critical Current

Links

JP9665979U 1979-07-12 1979-07-12 Pending JPS5614367U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9665979U JPS5614367U (ja) 1979-07-12 1979-07-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9665979U JPS5614367U (ja) 1979-07-12 1979-07-12

Publications (1)

Publication Number Publication Date
JPS5614367U true JPS5614367U (ja) 1981-02-06

Family

ID=29329472

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9665979U Pending JPS5614367U (ja) 1979-07-12 1979-07-12

Country Status (1)

Country Link
JP (1) JPS5614367U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0892764A (ja) * 1994-09-22 1996-04-09 Nec Kyushu Ltd スパッタ装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS501070B1 (ja) * 1969-12-04 1975-01-14
JPS5220319B2 (ja) * 1974-06-19 1977-06-02

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS501070B1 (ja) * 1969-12-04 1975-01-14
JPS5220319B2 (ja) * 1974-06-19 1977-06-02

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0892764A (ja) * 1994-09-22 1996-04-09 Nec Kyushu Ltd スパッタ装置

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