JPS5614365Y2 - - Google Patents

Info

Publication number
JPS5614365Y2
JPS5614365Y2 JP1976044199U JP4419976U JPS5614365Y2 JP S5614365 Y2 JPS5614365 Y2 JP S5614365Y2 JP 1976044199 U JP1976044199 U JP 1976044199U JP 4419976 U JP4419976 U JP 4419976U JP S5614365 Y2 JPS5614365 Y2 JP S5614365Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1976044199U
Other languages
Japanese (ja)
Other versions
JPS52135447U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1976044199U priority Critical patent/JPS5614365Y2/ja
Publication of JPS52135447U publication Critical patent/JPS52135447U/ja
Application granted granted Critical
Publication of JPS5614365Y2 publication Critical patent/JPS5614365Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1976044199U 1976-04-09 1976-04-09 Expired JPS5614365Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976044199U JPS5614365Y2 (enrdf_load_stackoverflow) 1976-04-09 1976-04-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976044199U JPS5614365Y2 (enrdf_load_stackoverflow) 1976-04-09 1976-04-09

Publications (2)

Publication Number Publication Date
JPS52135447U JPS52135447U (enrdf_load_stackoverflow) 1977-10-14
JPS5614365Y2 true JPS5614365Y2 (enrdf_load_stackoverflow) 1981-04-03

Family

ID=28503263

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976044199U Expired JPS5614365Y2 (enrdf_load_stackoverflow) 1976-04-09 1976-04-09

Country Status (1)

Country Link
JP (1) JPS5614365Y2 (enrdf_load_stackoverflow)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4843941A (enrdf_load_stackoverflow) * 1971-10-07 1973-06-25
JPS4946584A (enrdf_load_stackoverflow) * 1972-09-13 1974-05-04
JPS5418235B2 (enrdf_load_stackoverflow) * 1972-12-29 1979-07-05

Also Published As

Publication number Publication date
JPS52135447U (enrdf_load_stackoverflow) 1977-10-14

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