JPS56143269U - - Google Patents
Info
- Publication number
- JPS56143269U JPS56143269U JP4003380U JP4003380U JPS56143269U JP S56143269 U JPS56143269 U JP S56143269U JP 4003380 U JP4003380 U JP 4003380U JP 4003380 U JP4003380 U JP 4003380U JP S56143269 U JPS56143269 U JP S56143269U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4003380U JPS5929952Y2 (ja) | 1980-03-25 | 1980-03-25 | 真空蒸着における蒸着調節装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4003380U JPS5929952Y2 (ja) | 1980-03-25 | 1980-03-25 | 真空蒸着における蒸着調節装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56143269U true JPS56143269U (enExample) | 1981-10-29 |
| JPS5929952Y2 JPS5929952Y2 (ja) | 1984-08-27 |
Family
ID=29635461
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4003380U Expired JPS5929952Y2 (ja) | 1980-03-25 | 1980-03-25 | 真空蒸着における蒸着調節装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5929952Y2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5913069A (ja) * | 1982-07-09 | 1984-01-23 | Tokuda Seisakusho Ltd | スパツタリング装置 |
-
1980
- 1980-03-25 JP JP4003380U patent/JPS5929952Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5913069A (ja) * | 1982-07-09 | 1984-01-23 | Tokuda Seisakusho Ltd | スパツタリング装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5929952Y2 (ja) | 1984-08-27 |