JPS56142952U - - Google Patents
Info
- Publication number
- JPS56142952U JPS56142952U JP1980038712U JP3871280U JPS56142952U JP S56142952 U JPS56142952 U JP S56142952U JP 1980038712 U JP1980038712 U JP 1980038712U JP 3871280 U JP3871280 U JP 3871280U JP S56142952 U JPS56142952 U JP S56142952U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1980038712U JPS56142952U (sl) | 1980-03-26 | 1980-03-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1980038712U JPS56142952U (sl) | 1980-03-26 | 1980-03-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS56142952U true JPS56142952U (sl) | 1981-10-28 |
Family
ID=29634208
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1980038712U Pending JPS56142952U (sl) | 1980-03-26 | 1980-03-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56142952U (sl) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6288557U (sl) * | 1985-11-22 | 1987-06-06 | ||
| JPH0788760A (ja) * | 1993-09-21 | 1995-04-04 | Sumitomo Sitix Corp | 半導体基板の鏡面研磨装置 |
-
1980
- 1980-03-26 JP JP1980038712U patent/JPS56142952U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6288557U (sl) * | 1985-11-22 | 1987-06-06 | ||
| JPH0788760A (ja) * | 1993-09-21 | 1995-04-04 | Sumitomo Sitix Corp | 半導体基板の鏡面研磨装置 |