JPS5614150B2 - - Google Patents
Info
- Publication number
- JPS5614150B2 JPS5614150B2 JP15199875A JP15199875A JPS5614150B2 JP S5614150 B2 JPS5614150 B2 JP S5614150B2 JP 15199875 A JP15199875 A JP 15199875A JP 15199875 A JP15199875 A JP 15199875A JP S5614150 B2 JPS5614150 B2 JP S5614150B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50151998A JPS5276240A (en) | 1975-12-22 | 1975-12-22 | Method of forming shaping holes for obtaining electron beam having predetermined cross section |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50151998A JPS5276240A (en) | 1975-12-22 | 1975-12-22 | Method of forming shaping holes for obtaining electron beam having predetermined cross section |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5276240A JPS5276240A (en) | 1977-06-27 |
| JPS5614150B2 true JPS5614150B2 (OSRAM) | 1981-04-02 |
Family
ID=15530820
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50151998A Granted JPS5276240A (en) | 1975-12-22 | 1975-12-22 | Method of forming shaping holes for obtaining electron beam having predetermined cross section |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5276240A (OSRAM) |
-
1975
- 1975-12-22 JP JP50151998A patent/JPS5276240A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5276240A (en) | 1977-06-27 |