JPS56141390U - - Google Patents

Info

Publication number
JPS56141390U
JPS56141390U JP3947080U JP3947080U JPS56141390U JP S56141390 U JPS56141390 U JP S56141390U JP 3947080 U JP3947080 U JP 3947080U JP 3947080 U JP3947080 U JP 3947080U JP S56141390 U JPS56141390 U JP S56141390U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3947080U
Other languages
Japanese (ja)
Other versions
JPS6231997Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1980039470U priority Critical patent/JPS6231997Y2/ja
Publication of JPS56141390U publication Critical patent/JPS56141390U/ja
Application granted granted Critical
Publication of JPS6231997Y2 publication Critical patent/JPS6231997Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Resistance Heating (AREA)
JP1980039470U 1980-03-27 1980-03-27 Expired JPS6231997Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1980039470U JPS6231997Y2 (enrdf_load_stackoverflow) 1980-03-27 1980-03-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1980039470U JPS6231997Y2 (enrdf_load_stackoverflow) 1980-03-27 1980-03-27

Publications (2)

Publication Number Publication Date
JPS56141390U true JPS56141390U (enrdf_load_stackoverflow) 1981-10-26
JPS6231997Y2 JPS6231997Y2 (enrdf_load_stackoverflow) 1987-08-15

Family

ID=29634925

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1980039470U Expired JPS6231997Y2 (enrdf_load_stackoverflow) 1980-03-27 1980-03-27

Country Status (1)

Country Link
JP (1) JPS6231997Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4885438B2 (ja) * 2003-10-21 2012-02-29 株式会社日立国際電気 基板処理装置並びに基板処理装置用電気ヒーター及びこれを備えた基板処理装置並びに基板処理装置用電気ヒーターにおける発熱体の保持構造及び基板処理装置を用いた半導体装置の製造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4839291A (enrdf_load_stackoverflow) * 1971-09-25 1973-06-09
JPS5118966A (ja) * 1974-08-08 1976-02-14 Yamaha Motor Co Ltd Kannomagesochi
JPS5383150A (en) * 1976-12-27 1978-07-22 Carborundum Co Anchoring means for fixing heat insulating member

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4839291A (enrdf_load_stackoverflow) * 1971-09-25 1973-06-09
JPS5118966A (ja) * 1974-08-08 1976-02-14 Yamaha Motor Co Ltd Kannomagesochi
JPS5383150A (en) * 1976-12-27 1978-07-22 Carborundum Co Anchoring means for fixing heat insulating member

Also Published As

Publication number Publication date
JPS6231997Y2 (enrdf_load_stackoverflow) 1987-08-15

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