JPS561391B2 - - Google Patents
Info
- Publication number
- JPS561391B2 JPS561391B2 JP12073076A JP12073076A JPS561391B2 JP S561391 B2 JPS561391 B2 JP S561391B2 JP 12073076 A JP12073076 A JP 12073076A JP 12073076 A JP12073076 A JP 12073076A JP S561391 B2 JPS561391 B2 JP S561391B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12073076A JPS5345681A (en) | 1976-10-07 | 1976-10-07 | Ionic plating apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12073076A JPS5345681A (en) | 1976-10-07 | 1976-10-07 | Ionic plating apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5345681A JPS5345681A (en) | 1978-04-24 |
JPS561391B2 true JPS561391B2 (en) | 1981-01-13 |
Family
ID=14793559
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12073076A Granted JPS5345681A (en) | 1976-10-07 | 1976-10-07 | Ionic plating apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5345681A (en) |
-
1976
- 1976-10-07 JP JP12073076A patent/JPS5345681A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5345681A (en) | 1978-04-24 |