JPS56138879U - - Google Patents
Info
- Publication number
- JPS56138879U JPS56138879U JP3719380U JP3719380U JPS56138879U JP S56138879 U JPS56138879 U JP S56138879U JP 3719380 U JP3719380 U JP 3719380U JP 3719380 U JP3719380 U JP 3719380U JP S56138879 U JPS56138879 U JP S56138879U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3719380U JPS56138879U (enExample) | 1980-03-24 | 1980-03-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3719380U JPS56138879U (enExample) | 1980-03-24 | 1980-03-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS56138879U true JPS56138879U (enExample) | 1981-10-20 |
Family
ID=29632762
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3719380U Pending JPS56138879U (enExample) | 1980-03-24 | 1980-03-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56138879U (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1985001301A1 (fr) * | 1983-09-14 | 1985-03-28 | Kabushiki Kaisha Tokuda Seisakusho | Dispositif pulverisateur |
| JPH03180467A (ja) * | 1989-06-09 | 1991-08-06 | Tadahiro Omi | 薄膜形成装置および薄膜形成方法 |
-
1980
- 1980-03-24 JP JP3719380U patent/JPS56138879U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1985001301A1 (fr) * | 1983-09-14 | 1985-03-28 | Kabushiki Kaisha Tokuda Seisakusho | Dispositif pulverisateur |
| JPS6063367A (ja) * | 1983-09-14 | 1985-04-11 | Tokuda Seisakusho Ltd | スパツタリング装置 |
| JPH03180467A (ja) * | 1989-06-09 | 1991-08-06 | Tadahiro Omi | 薄膜形成装置および薄膜形成方法 |