JPS56136601A - Evaporator type separator - Google Patents
Evaporator type separatorInfo
- Publication number
- JPS56136601A JPS56136601A JP3990480A JP3990480A JPS56136601A JP S56136601 A JPS56136601 A JP S56136601A JP 3990480 A JP3990480 A JP 3990480A JP 3990480 A JP3990480 A JP 3990480A JP S56136601 A JPS56136601 A JP S56136601A
- Authority
- JP
- Japan
- Prior art keywords
- evaporator
- chloride
- heating
- liquid
- raw liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To eliminate scale sticking on heating surfaces and clogging of the device by using an outside kettle type evaporator separating the evaporator and a heating chamber, and additionally providing a settling chamber below the evaporator.
CONSTITUTION: In refining of, for example, semiconductor high-purity silicon chloride, the liquid-state crude trichlorosilane and silicon tetrachloride obtained by the reaction of metallic silicon and gaseous HCl are pumped as raw liquid through a feed port 5 into an evaporator 1. The solid chlorides such as aluminum chloride, iron chloride, calcium chloride and other in the raw liquid settle into a settling chamber 14 lower than the opening part of a liquid passage 12 down to a heating kettle 10 in the lower part of the vessel 1. Then, the amount of the solid chlorides flowing into the heating chamber of an outside kettle 10 past the passage 12 is much less than that of the raw liquid supplied from 5.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3990480A JPS56136601A (en) | 1980-03-27 | 1980-03-27 | Evaporator type separator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3990480A JPS56136601A (en) | 1980-03-27 | 1980-03-27 | Evaporator type separator |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS56136601A true JPS56136601A (en) | 1981-10-26 |
Family
ID=12565939
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3990480A Pending JPS56136601A (en) | 1980-03-27 | 1980-03-27 | Evaporator type separator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56136601A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2002038497A1 (en) * | 2000-11-13 | 2002-05-16 | Solarworld Aktiengesellschaft | Method for removing aluminium from chlorosilanes |
JP2008184378A (en) * | 2007-01-31 | 2008-08-14 | Osaka Titanium Technologies Co Ltd | Method for producing high-purity trichlorosilane |
-
1980
- 1980-03-27 JP JP3990480A patent/JPS56136601A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2002038497A1 (en) * | 2000-11-13 | 2002-05-16 | Solarworld Aktiengesellschaft | Method for removing aluminium from chlorosilanes |
JP2008184378A (en) * | 2007-01-31 | 2008-08-14 | Osaka Titanium Technologies Co Ltd | Method for producing high-purity trichlorosilane |
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