JPS5613389U - - Google Patents
Info
- Publication number
- JPS5613389U JPS5613389U JP9612879U JP9612879U JPS5613389U JP S5613389 U JPS5613389 U JP S5613389U JP 9612879 U JP9612879 U JP 9612879U JP 9612879 U JP9612879 U JP 9612879U JP S5613389 U JPS5613389 U JP S5613389U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9612879U JPS5613389U (en) | 1979-07-11 | 1979-07-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9612879U JPS5613389U (en) | 1979-07-11 | 1979-07-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5613389U true JPS5613389U (en) | 1981-02-04 |
Family
ID=29328960
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9612879U Pending JPS5613389U (en) | 1979-07-11 | 1979-07-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5613389U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2018537802A (en) * | 2015-10-05 | 2018-12-20 | ミコ リミテッド | Substrate heating device with improved temperature deviation characteristics |
-
1979
- 1979-07-11 JP JP9612879U patent/JPS5613389U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2018537802A (en) * | 2015-10-05 | 2018-12-20 | ミコ リミテッド | Substrate heating device with improved temperature deviation characteristics |
| US11133202B2 (en) | 2015-10-05 | 2021-09-28 | Mico Ceramics Ltd. | Substrate heating apparatus with enhanced temperature uniformity characteristic |