JPS56131448U - - Google Patents
Info
- Publication number
- JPS56131448U JPS56131448U JP2897780U JP2897780U JPS56131448U JP S56131448 U JPS56131448 U JP S56131448U JP 2897780 U JP2897780 U JP 2897780U JP 2897780 U JP2897780 U JP 2897780U JP S56131448 U JPS56131448 U JP S56131448U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2897780U JPS56131448U (en) | 1980-03-07 | 1980-03-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2897780U JPS56131448U (en) | 1980-03-07 | 1980-03-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS56131448U true JPS56131448U (en) | 1981-10-06 |
Family
ID=29624886
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2897780U Pending JPS56131448U (en) | 1980-03-07 | 1980-03-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56131448U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5970946A (en) * | 1982-10-15 | 1984-04-21 | Toshiba Corp | Apparatus for measuring absorbance |
| JPS60194331A (en) * | 1984-02-24 | 1985-10-02 | ライボルト・アクチェンゲゼルシャフト | Spectrophotometer |
| JP2018121075A (en) * | 2018-04-06 | 2018-08-02 | 東京エレクトロン株式会社 | Substrate processing device, and substrate processing method |
-
1980
- 1980-03-07 JP JP2897780U patent/JPS56131448U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5970946A (en) * | 1982-10-15 | 1984-04-21 | Toshiba Corp | Apparatus for measuring absorbance |
| JPS60194331A (en) * | 1984-02-24 | 1985-10-02 | ライボルト・アクチェンゲゼルシャフト | Spectrophotometer |
| JP2018121075A (en) * | 2018-04-06 | 2018-08-02 | 東京エレクトロン株式会社 | Substrate processing device, and substrate processing method |