JPS56130935U - - Google Patents
Info
- Publication number
- JPS56130935U JPS56130935U JP3010380U JP3010380U JPS56130935U JP S56130935 U JPS56130935 U JP S56130935U JP 3010380 U JP3010380 U JP 3010380U JP 3010380 U JP3010380 U JP 3010380U JP S56130935 U JPS56130935 U JP S56130935U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3010380U JPS6022351Y2 (ja) | 1980-03-07 | 1980-03-07 | 反転露光装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3010380U JPS6022351Y2 (ja) | 1980-03-07 | 1980-03-07 | 反転露光装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56130935U true JPS56130935U (enExample) | 1981-10-05 |
| JPS6022351Y2 JPS6022351Y2 (ja) | 1985-07-03 |
Family
ID=29626001
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3010380U Expired JPS6022351Y2 (ja) | 1980-03-07 | 1980-03-07 | 反転露光装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6022351Y2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6161542U (enExample) * | 1984-09-27 | 1986-04-25 |
-
1980
- 1980-03-07 JP JP3010380U patent/JPS6022351Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6161542U (enExample) * | 1984-09-27 | 1986-04-25 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6022351Y2 (ja) | 1985-07-03 |