JPS56130747U - - Google Patents
Info
- Publication number
- JPS56130747U JPS56130747U JP3052280U JP3052280U JPS56130747U JP S56130747 U JPS56130747 U JP S56130747U JP 3052280 U JP3052280 U JP 3052280U JP 3052280 U JP3052280 U JP 3052280U JP S56130747 U JPS56130747 U JP S56130747U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3052280U JPS6223541Y2 (en:Method) | 1980-03-06 | 1980-03-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3052280U JPS6223541Y2 (en:Method) | 1980-03-06 | 1980-03-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56130747U true JPS56130747U (en:Method) | 1981-10-03 |
| JPS6223541Y2 JPS6223541Y2 (en:Method) | 1987-06-16 |
Family
ID=29626417
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3052280U Expired JPS6223541Y2 (en:Method) | 1980-03-06 | 1980-03-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6223541Y2 (en:Method) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2024526183A (ja) * | 2021-06-23 | 2024-07-17 | インテグリス・インコーポレーテッド | ガス処理システムおよび方法 |
| JP2025507136A (ja) * | 2022-03-11 | 2025-03-13 | インテグリス・インコーポレーテッド | ガス処理システムおよび方法 |
-
1980
- 1980-03-06 JP JP3052280U patent/JPS6223541Y2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2024526183A (ja) * | 2021-06-23 | 2024-07-17 | インテグリス・インコーポレーテッド | ガス処理システムおよび方法 |
| US12343671B2 (en) | 2021-06-23 | 2025-07-01 | Entegris, Inc. | Gas-processing systems and methods |
| JP2025507136A (ja) * | 2022-03-11 | 2025-03-13 | インテグリス・インコーポレーテッド | ガス処理システムおよび方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6223541Y2 (en:Method) | 1987-06-16 |