JPS56130626A - Wavelength measuring method of and apparatus for laser beam - Google Patents
Wavelength measuring method of and apparatus for laser beamInfo
- Publication number
- JPS56130626A JPS56130626A JP2533680A JP2533680A JPS56130626A JP S56130626 A JPS56130626 A JP S56130626A JP 2533680 A JP2533680 A JP 2533680A JP 2533680 A JP2533680 A JP 2533680A JP S56130626 A JPS56130626 A JP S56130626A
- Authority
- JP
- Japan
- Prior art keywords
- laser beam
- measuring method
- wavelength measuring
- wavelength
- laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2533680A JPS56130626A (en) | 1980-03-03 | 1980-03-03 | Wavelength measuring method of and apparatus for laser beam |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2533680A JPS56130626A (en) | 1980-03-03 | 1980-03-03 | Wavelength measuring method of and apparatus for laser beam |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS56130626A true JPS56130626A (en) | 1981-10-13 |
Family
ID=12163069
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2533680A Pending JPS56130626A (en) | 1980-03-03 | 1980-03-03 | Wavelength measuring method of and apparatus for laser beam |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56130626A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011053142A (en) * | 2009-09-03 | 2011-03-17 | Nikon Corp | Wavelength detector, pressure detector, vibration isolator, and exposure system |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS517979A (en) * | 1974-05-30 | 1976-01-22 | Kaaru Tsuaisu Ieena Veb | KUTSUSETSURITSUOKETSUTEISURUFUKUKOSOKUKANSHOKEI |
-
1980
- 1980-03-03 JP JP2533680A patent/JPS56130626A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS517979A (en) * | 1974-05-30 | 1976-01-22 | Kaaru Tsuaisu Ieena Veb | KUTSUSETSURITSUOKETSUTEISURUFUKUKOSOKUKANSHOKEI |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011053142A (en) * | 2009-09-03 | 2011-03-17 | Nikon Corp | Wavelength detector, pressure detector, vibration isolator, and exposure system |
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