JPS56130626A - Wavelength measuring method of and apparatus for laser beam - Google Patents

Wavelength measuring method of and apparatus for laser beam

Info

Publication number
JPS56130626A
JPS56130626A JP2533680A JP2533680A JPS56130626A JP S56130626 A JPS56130626 A JP S56130626A JP 2533680 A JP2533680 A JP 2533680A JP 2533680 A JP2533680 A JP 2533680A JP S56130626 A JPS56130626 A JP S56130626A
Authority
JP
Japan
Prior art keywords
laser beam
measuring method
wavelength measuring
wavelength
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2533680A
Other languages
Japanese (ja)
Inventor
Riyuugeru Rorufu
Shieraa Berunaa
Oeruteru Noruberuto
Berunaa Gomumeru Kaaru
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jenoptik AG
Original Assignee
Carl Zeiss Jena GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss Jena GmbH filed Critical Carl Zeiss Jena GmbH
Priority to JP2533680A priority Critical patent/JPS56130626A/en
Publication of JPS56130626A publication Critical patent/JPS56130626A/en
Pending legal-status Critical Current

Links

JP2533680A 1980-03-03 1980-03-03 Wavelength measuring method of and apparatus for laser beam Pending JPS56130626A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2533680A JPS56130626A (en) 1980-03-03 1980-03-03 Wavelength measuring method of and apparatus for laser beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2533680A JPS56130626A (en) 1980-03-03 1980-03-03 Wavelength measuring method of and apparatus for laser beam

Publications (1)

Publication Number Publication Date
JPS56130626A true JPS56130626A (en) 1981-10-13

Family

ID=12163069

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2533680A Pending JPS56130626A (en) 1980-03-03 1980-03-03 Wavelength measuring method of and apparatus for laser beam

Country Status (1)

Country Link
JP (1) JPS56130626A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011053142A (en) * 2009-09-03 2011-03-17 Nikon Corp Wavelength detector, pressure detector, vibration isolator, and exposure system

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS517979A (en) * 1974-05-30 1976-01-22 Kaaru Tsuaisu Ieena Veb KUTSUSETSURITSUOKETSUTEISURUFUKUKOSOKUKANSHOKEI

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS517979A (en) * 1974-05-30 1976-01-22 Kaaru Tsuaisu Ieena Veb KUTSUSETSURITSUOKETSUTEISURUFUKUKOSOKUKANSHOKEI

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011053142A (en) * 2009-09-03 2011-03-17 Nikon Corp Wavelength detector, pressure detector, vibration isolator, and exposure system

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