JPS56126476U - - Google Patents

Info

Publication number
JPS56126476U
JPS56126476U JP2237680U JP2237680U JPS56126476U JP S56126476 U JPS56126476 U JP S56126476U JP 2237680 U JP2237680 U JP 2237680U JP 2237680 U JP2237680 U JP 2237680U JP S56126476 U JPS56126476 U JP S56126476U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2237680U
Other languages
Japanese (ja)
Other versions
JPS5932588Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1980022376U priority Critical patent/JPS5932588Y2/ja
Publication of JPS56126476U publication Critical patent/JPS56126476U/ja
Application granted granted Critical
Publication of JPS5932588Y2 publication Critical patent/JPS5932588Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1980022376U 1980-02-25 1980-02-25 ワ−クホルダ装置 Expired JPS5932588Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1980022376U JPS5932588Y2 (ja) 1980-02-25 1980-02-25 ワ−クホルダ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1980022376U JPS5932588Y2 (ja) 1980-02-25 1980-02-25 ワ−クホルダ装置

Publications (2)

Publication Number Publication Date
JPS56126476U true JPS56126476U (enExample) 1981-09-26
JPS5932588Y2 JPS5932588Y2 (ja) 1984-09-12

Family

ID=29618502

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1980022376U Expired JPS5932588Y2 (ja) 1980-02-25 1980-02-25 ワ−クホルダ装置

Country Status (1)

Country Link
JP (1) JPS5932588Y2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59118882A (ja) * 1982-12-27 1984-07-09 Hitachi Ltd 成膜装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4716958U (enExample) * 1971-04-06 1972-10-27

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4716958U (enExample) * 1971-04-06 1972-10-27

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59118882A (ja) * 1982-12-27 1984-07-09 Hitachi Ltd 成膜装置

Also Published As

Publication number Publication date
JPS5932588Y2 (ja) 1984-09-12

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