JPS56126340U - - Google Patents
Info
- Publication number
- JPS56126340U JPS56126340U JP2340580U JP2340580U JPS56126340U JP S56126340 U JPS56126340 U JP S56126340U JP 2340580 U JP2340580 U JP 2340580U JP 2340580 U JP2340580 U JP 2340580U JP S56126340 U JPS56126340 U JP S56126340U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Machine Tool Sensing Apparatuses (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1980023405U JPS624440Y2 (en:Method) | 1980-02-25 | 1980-02-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1980023405U JPS624440Y2 (en:Method) | 1980-02-25 | 1980-02-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56126340U true JPS56126340U (en:Method) | 1981-09-25 |
| JPS624440Y2 JPS624440Y2 (en:Method) | 1987-01-31 |
Family
ID=29619507
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1980023405U Expired JPS624440Y2 (en:Method) | 1980-02-25 | 1980-02-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS624440Y2 (en:Method) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5399082A (en) * | 1977-02-10 | 1978-08-30 | Mitsubishi Electric Corp | High frequency sputtering apparatus |
-
1980
- 1980-02-25 JP JP1980023405U patent/JPS624440Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5399082A (en) * | 1977-02-10 | 1978-08-30 | Mitsubishi Electric Corp | High frequency sputtering apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS624440Y2 (en:Method) | 1987-01-31 |