JPS56126340U - - Google Patents

Info

Publication number
JPS56126340U
JPS56126340U JP2340580U JP2340580U JPS56126340U JP S56126340 U JPS56126340 U JP S56126340U JP 2340580 U JP2340580 U JP 2340580U JP 2340580 U JP2340580 U JP 2340580U JP S56126340 U JPS56126340 U JP S56126340U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2340580U
Other languages
Japanese (ja)
Other versions
JPS624440Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1980023405U priority Critical patent/JPS624440Y2/ja
Publication of JPS56126340U publication Critical patent/JPS56126340U/ja
Application granted granted Critical
Publication of JPS624440Y2 publication Critical patent/JPS624440Y2/ja
Expired legal-status Critical Current

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Landscapes

  • Machine Tool Sensing Apparatuses (AREA)
JP1980023405U 1980-02-25 1980-02-25 Expired JPS624440Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1980023405U JPS624440Y2 (enrdf_load_stackoverflow) 1980-02-25 1980-02-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1980023405U JPS624440Y2 (enrdf_load_stackoverflow) 1980-02-25 1980-02-25

Publications (2)

Publication Number Publication Date
JPS56126340U true JPS56126340U (enrdf_load_stackoverflow) 1981-09-25
JPS624440Y2 JPS624440Y2 (enrdf_load_stackoverflow) 1987-01-31

Family

ID=29619507

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1980023405U Expired JPS624440Y2 (enrdf_load_stackoverflow) 1980-02-25 1980-02-25

Country Status (1)

Country Link
JP (1) JPS624440Y2 (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5399082A (en) * 1977-02-10 1978-08-30 Mitsubishi Electric Corp High frequency sputtering apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5399082A (en) * 1977-02-10 1978-08-30 Mitsubishi Electric Corp High frequency sputtering apparatus

Also Published As

Publication number Publication date
JPS624440Y2 (enrdf_load_stackoverflow) 1987-01-31

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