JPS5612247B2 - - Google Patents
Info
- Publication number
- JPS5612247B2 JPS5612247B2 JP13375976A JP13375976A JPS5612247B2 JP S5612247 B2 JPS5612247 B2 JP S5612247B2 JP 13375976 A JP13375976 A JP 13375976A JP 13375976 A JP13375976 A JP 13375976A JP S5612247 B2 JPS5612247 B2 JP S5612247B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Silicon Compounds (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13375976A JPS5358998A (en) | 1976-11-09 | 1976-11-09 | Production of titanium silicide |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13375976A JPS5358998A (en) | 1976-11-09 | 1976-11-09 | Production of titanium silicide |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5358998A JPS5358998A (en) | 1978-05-27 |
| JPS5612247B2 true JPS5612247B2 (cs) | 1981-03-19 |
Family
ID=15112273
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13375976A Granted JPS5358998A (en) | 1976-11-09 | 1976-11-09 | Production of titanium silicide |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5358998A (cs) |
-
1976
- 1976-11-09 JP JP13375976A patent/JPS5358998A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5358998A (en) | 1978-05-27 |