JPS5612206U - - Google Patents
Info
- Publication number
- JPS5612206U JPS5612206U JP9397579U JP9397579U JPS5612206U JP S5612206 U JPS5612206 U JP S5612206U JP 9397579 U JP9397579 U JP 9397579U JP 9397579 U JP9397579 U JP 9397579U JP S5612206 U JPS5612206 U JP S5612206U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Coating Apparatus (AREA)
- Control Of Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9397579U JPS5612206U (enExample) | 1979-07-06 | 1979-07-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9397579U JPS5612206U (enExample) | 1979-07-06 | 1979-07-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5612206U true JPS5612206U (enExample) | 1981-02-02 |
Family
ID=29326867
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9397579U Pending JPS5612206U (enExample) | 1979-07-06 | 1979-07-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5612206U (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5666044A (en) * | 1979-11-05 | 1981-06-04 | Toshiba Corp | Semiconductor device |
| JPS6469012A (en) * | 1987-09-10 | 1989-03-15 | Kyushu Nippon Electric | Semiconductor manufacturing apparatus |
-
1979
- 1979-07-06 JP JP9397579U patent/JPS5612206U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5666044A (en) * | 1979-11-05 | 1981-06-04 | Toshiba Corp | Semiconductor device |
| JPS6469012A (en) * | 1987-09-10 | 1989-03-15 | Kyushu Nippon Electric | Semiconductor manufacturing apparatus |