JPS56119646U - - Google Patents
Info
- Publication number
- JPS56119646U JPS56119646U JP1716680U JP1716680U JPS56119646U JP S56119646 U JPS56119646 U JP S56119646U JP 1716680 U JP1716680 U JP 1716680U JP 1716680 U JP1716680 U JP 1716680U JP S56119646 U JPS56119646 U JP S56119646U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1716680U JPS56119646U (enExample) | 1980-02-15 | 1980-02-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1716680U JPS56119646U (enExample) | 1980-02-15 | 1980-02-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS56119646U true JPS56119646U (enExample) | 1981-09-11 |
Family
ID=29613546
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1716680U Pending JPS56119646U (enExample) | 1980-02-15 | 1980-02-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56119646U (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60162218A (ja) * | 1984-02-02 | 1985-08-24 | Canon Inc | 露光装置 |
| JPH03180019A (ja) * | 1989-12-08 | 1991-08-06 | Mitsubishi Electric Corp | 投影露光装置 |
-
1980
- 1980-02-15 JP JP1716680U patent/JPS56119646U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60162218A (ja) * | 1984-02-02 | 1985-08-24 | Canon Inc | 露光装置 |
| JPH03180019A (ja) * | 1989-12-08 | 1991-08-06 | Mitsubishi Electric Corp | 投影露光装置 |