JPS5611932B2 - - Google Patents
Info
- Publication number
- JPS5611932B2 JPS5611932B2 JP9901772A JP9901772A JPS5611932B2 JP S5611932 B2 JPS5611932 B2 JP S5611932B2 JP 9901772 A JP9901772 A JP 9901772A JP 9901772 A JP9901772 A JP 9901772A JP S5611932 B2 JPS5611932 B2 JP S5611932B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9901772A JPS5611932B2 (cs) | 1972-10-04 | 1972-10-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9901772A JPS5611932B2 (cs) | 1972-10-04 | 1972-10-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4958771A JPS4958771A (cs) | 1974-06-07 |
| JPS5611932B2 true JPS5611932B2 (cs) | 1981-03-18 |
Family
ID=14235379
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9901772A Expired JPS5611932B2 (cs) | 1972-10-04 | 1972-10-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5611932B2 (cs) |
-
1972
- 1972-10-04 JP JP9901772A patent/JPS5611932B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4958771A (cs) | 1974-06-07 |