JPS56118775U - - Google Patents
Info
- Publication number
- JPS56118775U JPS56118775U JP1676380U JP1676380U JPS56118775U JP S56118775 U JPS56118775 U JP S56118775U JP 1676380 U JP1676380 U JP 1676380U JP 1676380 U JP1676380 U JP 1676380U JP S56118775 U JPS56118775 U JP S56118775U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1676380U JPS56118775U (ja) | 1980-02-12 | 1980-02-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1676380U JPS56118775U (ja) | 1980-02-12 | 1980-02-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS56118775U true JPS56118775U (ja) | 1981-09-10 |
Family
ID=29613164
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1676380U Pending JPS56118775U (ja) | 1980-02-12 | 1980-02-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56118775U (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02259070A (ja) * | 1989-03-31 | 1990-10-19 | Matsushita Electric Ind Co Ltd | スパッタ装置 |
-
1980
- 1980-02-12 JP JP1676380U patent/JPS56118775U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02259070A (ja) * | 1989-03-31 | 1990-10-19 | Matsushita Electric Ind Co Ltd | スパッタ装置 |