JPS5611759Y2 - - Google Patents
Info
- Publication number
- JPS5611759Y2 JPS5611759Y2 JP7422676U JP7422676U JPS5611759Y2 JP S5611759 Y2 JPS5611759 Y2 JP S5611759Y2 JP 7422676 U JP7422676 U JP 7422676U JP 7422676 U JP7422676 U JP 7422676U JP S5611759 Y2 JPS5611759 Y2 JP S5611759Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Surface Heating Bodies (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7422676U JPS5611759Y2 (en:Method) | 1976-06-07 | 1976-06-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7422676U JPS5611759Y2 (en:Method) | 1976-06-07 | 1976-06-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52165339U JPS52165339U (en:Method) | 1977-12-14 |
| JPS5611759Y2 true JPS5611759Y2 (en:Method) | 1981-03-17 |
Family
ID=28547202
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7422676U Expired JPS5611759Y2 (en:Method) | 1976-06-07 | 1976-06-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5611759Y2 (en:Method) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0770297B2 (ja) * | 1986-05-20 | 1995-07-31 | 東京エレクトロン株式会社 | イオン注入装置におけるウエハ保持装置 |
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1976
- 1976-06-07 JP JP7422676U patent/JPS5611759Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52165339U (en:Method) | 1977-12-14 |