JPS56117544U - - Google Patents
Info
- Publication number
- JPS56117544U JPS56117544U JP1407880U JP1407880U JPS56117544U JP S56117544 U JPS56117544 U JP S56117544U JP 1407880 U JP1407880 U JP 1407880U JP 1407880 U JP1407880 U JP 1407880U JP S56117544 U JPS56117544 U JP S56117544U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1407880U JPS56117544U (en, 2012) | 1980-02-08 | 1980-02-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1407880U JPS56117544U (en, 2012) | 1980-02-08 | 1980-02-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS56117544U true JPS56117544U (en, 2012) | 1981-09-08 |
Family
ID=29610580
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1407880U Pending JPS56117544U (en, 2012) | 1980-02-08 | 1980-02-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56117544U (en, 2012) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4918614U (en, 2012) * | 1972-05-20 | 1974-02-16 | ||
| JPS5295967A (en) * | 1976-02-09 | 1977-08-12 | Hitachi Ltd | Wafer washing and drying unit |
-
1980
- 1980-02-08 JP JP1407880U patent/JPS56117544U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4918614U (en, 2012) * | 1972-05-20 | 1974-02-16 | ||
| JPS5295967A (en) * | 1976-02-09 | 1977-08-12 | Hitachi Ltd | Wafer washing and drying unit |