JPS5611752B2 - - Google Patents

Info

Publication number
JPS5611752B2
JPS5611752B2 JP11448173A JP11448173A JPS5611752B2 JP S5611752 B2 JPS5611752 B2 JP S5611752B2 JP 11448173 A JP11448173 A JP 11448173A JP 11448173 A JP11448173 A JP 11448173A JP S5611752 B2 JPS5611752 B2 JP S5611752B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11448173A
Other languages
Japanese (ja)
Other versions
JPS5064184A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11448173A priority Critical patent/JPS5611752B2/ja
Publication of JPS5064184A publication Critical patent/JPS5064184A/ja
Publication of JPS5611752B2 publication Critical patent/JPS5611752B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Photoreceptors In Electrophotography (AREA)
  • Physical Vapour Deposition (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Light Receiving Elements (AREA)
JP11448173A 1973-10-12 1973-10-12 Expired JPS5611752B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11448173A JPS5611752B2 (enrdf_load_stackoverflow) 1973-10-12 1973-10-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11448173A JPS5611752B2 (enrdf_load_stackoverflow) 1973-10-12 1973-10-12

Publications (2)

Publication Number Publication Date
JPS5064184A JPS5064184A (enrdf_load_stackoverflow) 1975-05-31
JPS5611752B2 true JPS5611752B2 (enrdf_load_stackoverflow) 1981-03-17

Family

ID=14638809

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11448173A Expired JPS5611752B2 (enrdf_load_stackoverflow) 1973-10-12 1973-10-12

Country Status (1)

Country Link
JP (1) JPS5611752B2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002348658A (ja) * 2001-05-23 2002-12-04 Anelva Corp 蒸着源並びにそれを用いた薄膜形成方法及び形成装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53108044A (en) * 1977-03-03 1978-09-20 Hattori Isao Evaporation source for vacuum evaporation

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5621069B2 (enrdf_load_stackoverflow) * 1973-09-11 1981-05-16

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002348658A (ja) * 2001-05-23 2002-12-04 Anelva Corp 蒸着源並びにそれを用いた薄膜形成方法及び形成装置

Also Published As

Publication number Publication date
JPS5064184A (enrdf_load_stackoverflow) 1975-05-31

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