JPS56117119U - - Google Patents

Info

Publication number
JPS56117119U
JPS56117119U JP1560080U JP1560080U JPS56117119U JP S56117119 U JPS56117119 U JP S56117119U JP 1560080 U JP1560080 U JP 1560080U JP 1560080 U JP1560080 U JP 1560080U JP S56117119 U JPS56117119 U JP S56117119U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1560080U
Other languages
Japanese (ja)
Other versions
JPS6236974Y2 (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1560080U priority Critical patent/JPS6236974Y2/ja
Publication of JPS56117119U publication Critical patent/JPS56117119U/ja
Application granted granted Critical
Publication of JPS6236974Y2 publication Critical patent/JPS6236974Y2/ja
Expired legal-status Critical Current

Links

JP1560080U 1980-02-08 1980-02-08 Expired JPS6236974Y2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1560080U JPS6236974Y2 (en:Method) 1980-02-08 1980-02-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1560080U JPS6236974Y2 (en:Method) 1980-02-08 1980-02-08

Publications (2)

Publication Number Publication Date
JPS56117119U true JPS56117119U (en:Method) 1981-09-08
JPS6236974Y2 JPS6236974Y2 (en:Method) 1987-09-21

Family

ID=29612050

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1560080U Expired JPS6236974Y2 (en:Method) 1980-02-08 1980-02-08

Country Status (1)

Country Link
JP (1) JPS6236974Y2 (en:Method)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6375741B2 (en) 1991-03-06 2002-04-23 Timothy J. Reardon Semiconductor processing spray coating apparatus

Also Published As

Publication number Publication date
JPS6236974Y2 (en:Method) 1987-09-21

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