JPS56116687U - - Google Patents
Info
- Publication number
- JPS56116687U JPS56116687U JP1384680U JP1384680U JPS56116687U JP S56116687 U JPS56116687 U JP S56116687U JP 1384680 U JP1384680 U JP 1384680U JP 1384680 U JP1384680 U JP 1384680U JP S56116687 U JPS56116687 U JP S56116687U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1384680U JPS56116687U (en) | 1980-02-06 | 1980-02-06 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1384680U JPS56116687U (en) | 1980-02-06 | 1980-02-06 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS56116687U true JPS56116687U (en) | 1981-09-07 |
Family
ID=29610353
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1384680U Pending JPS56116687U (en) | 1980-02-06 | 1980-02-06 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56116687U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63183041A (en) * | 1987-01-26 | 1988-07-28 | キヤノン株式会社 | Surface examination apparatus |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5280779A (en) * | 1975-12-27 | 1977-07-06 | Fujitsu Ltd | Production of simiconductor device |
-
1980
- 1980-02-06 JP JP1384680U patent/JPS56116687U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5280779A (en) * | 1975-12-27 | 1977-07-06 | Fujitsu Ltd | Production of simiconductor device |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63183041A (en) * | 1987-01-26 | 1988-07-28 | キヤノン株式会社 | Surface examination apparatus |