JPS56111167U - - Google Patents
Info
- Publication number
- JPS56111167U JPS56111167U JP753780U JP753780U JPS56111167U JP S56111167 U JPS56111167 U JP S56111167U JP 753780 U JP753780 U JP 753780U JP 753780 U JP753780 U JP 753780U JP S56111167 U JPS56111167 U JP S56111167U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP753780U JPS5928034Y2 (ja) | 1980-01-26 | 1980-01-26 | マグネトロンスパッタ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP753780U JPS5928034Y2 (ja) | 1980-01-26 | 1980-01-26 | マグネトロンスパッタ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56111167U true JPS56111167U (ref) | 1981-08-27 |
| JPS5928034Y2 JPS5928034Y2 (ja) | 1984-08-14 |
Family
ID=29604185
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP753780U Expired JPS5928034Y2 (ja) | 1980-01-26 | 1980-01-26 | マグネトロンスパッタ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5928034Y2 (ref) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58136777A (ja) * | 1982-02-09 | 1983-08-13 | Hitachi Ltd | スパツタ薄膜形成装置 |
-
1980
- 1980-01-26 JP JP753780U patent/JPS5928034Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58136777A (ja) * | 1982-02-09 | 1983-08-13 | Hitachi Ltd | スパツタ薄膜形成装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5928034Y2 (ja) | 1984-08-14 |