JPS56109619U - - Google Patents
Info
- Publication number
- JPS56109619U JPS56109619U JP18277980U JP18277980U JPS56109619U JP S56109619 U JPS56109619 U JP S56109619U JP 18277980 U JP18277980 U JP 18277980U JP 18277980 U JP18277980 U JP 18277980U JP S56109619 U JPS56109619 U JP S56109619U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Exhaust Gas After Treatment (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18277980U JPS6224138Y2 (https=) | 1980-12-18 | 1980-12-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18277980U JPS6224138Y2 (https=) | 1980-12-18 | 1980-12-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56109619U true JPS56109619U (https=) | 1981-08-25 |
| JPS6224138Y2 JPS6224138Y2 (https=) | 1987-06-19 |
Family
ID=29693104
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18277980U Expired JPS6224138Y2 (https=) | 1980-12-18 | 1980-12-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6224138Y2 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6998014B2 (en) | 2002-01-26 | 2006-02-14 | Applied Materials, Inc. | Apparatus and method for plasma assisted deposition |
| EP1420080A3 (en) | 2002-11-14 | 2005-11-09 | Applied Materials, Inc. | Apparatus and method for hybrid chemical deposition processes |
-
1980
- 1980-12-18 JP JP18277980U patent/JPS6224138Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6224138Y2 (https=) | 1987-06-19 |