JPS56106451U - - Google Patents
Info
- Publication number
- JPS56106451U JPS56106451U JP249380U JP249380U JPS56106451U JP S56106451 U JPS56106451 U JP S56106451U JP 249380 U JP249380 U JP 249380U JP 249380 U JP249380 U JP 249380U JP S56106451 U JPS56106451 U JP S56106451U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP249380U JPS56106451U (enExample) | 1980-01-16 | 1980-01-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP249380U JPS56106451U (enExample) | 1980-01-16 | 1980-01-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS56106451U true JPS56106451U (enExample) | 1981-08-19 |
Family
ID=29599326
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP249380U Pending JPS56106451U (enExample) | 1980-01-16 | 1980-01-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56106451U (enExample) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5977225U (ja) * | 1982-11-15 | 1984-05-25 | ソニー株式会社 | 半導体素子製造装置 |
| JPS6012175A (ja) * | 1983-06-30 | 1985-01-22 | Tokyo Denshi Kagaku Kabushiki | 塗布液の供給方法 |
| JPS63319078A (ja) * | 1987-06-22 | 1988-12-27 | Tokyo Electron Ltd | 吐出装置 |
| JPS6464218A (en) * | 1987-09-03 | 1989-03-10 | Tokyo Electron Ltd | Applicator for resist |
| JPH01249162A (ja) * | 1988-03-30 | 1989-10-04 | Teru Kyushu Kk | レジスト液吐出装置 |
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1980
- 1980-01-16 JP JP249380U patent/JPS56106451U/ja active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5977225U (ja) * | 1982-11-15 | 1984-05-25 | ソニー株式会社 | 半導体素子製造装置 |
| JPS6012175A (ja) * | 1983-06-30 | 1985-01-22 | Tokyo Denshi Kagaku Kabushiki | 塗布液の供給方法 |
| JPS63319078A (ja) * | 1987-06-22 | 1988-12-27 | Tokyo Electron Ltd | 吐出装置 |
| JPS6464218A (en) * | 1987-09-03 | 1989-03-10 | Tokyo Electron Ltd | Applicator for resist |
| JPH01249162A (ja) * | 1988-03-30 | 1989-10-04 | Teru Kyushu Kk | レジスト液吐出装置 |