JPS56106451U - - Google Patents

Info

Publication number
JPS56106451U
JPS56106451U JP249380U JP249380U JPS56106451U JP S56106451 U JPS56106451 U JP S56106451U JP 249380 U JP249380 U JP 249380U JP 249380 U JP249380 U JP 249380U JP S56106451 U JPS56106451 U JP S56106451U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP249380U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP249380U priority Critical patent/JPS56106451U/ja
Publication of JPS56106451U publication Critical patent/JPS56106451U/ja
Pending legal-status Critical Current

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Landscapes

  • Coating Apparatus (AREA)
JP249380U 1980-01-16 1980-01-16 Pending JPS56106451U (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP249380U JPS56106451U (enrdf_load_html_response) 1980-01-16 1980-01-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP249380U JPS56106451U (enrdf_load_html_response) 1980-01-16 1980-01-16

Publications (1)

Publication Number Publication Date
JPS56106451U true JPS56106451U (enrdf_load_html_response) 1981-08-19

Family

ID=29599326

Family Applications (1)

Application Number Title Priority Date Filing Date
JP249380U Pending JPS56106451U (enrdf_load_html_response) 1980-01-16 1980-01-16

Country Status (1)

Country Link
JP (1) JPS56106451U (enrdf_load_html_response)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5977225U (ja) * 1982-11-15 1984-05-25 ソニー株式会社 半導体素子製造装置
JPS6012175A (ja) * 1983-06-30 1985-01-22 Tokyo Denshi Kagaku Kabushiki 塗布液の供給方法
JPS63319078A (ja) * 1987-06-22 1988-12-27 Tokyo Electron Ltd 吐出装置
JPS6464218A (en) * 1987-09-03 1989-03-10 Tokyo Electron Ltd Applicator for resist
JPH01249162A (ja) * 1988-03-30 1989-10-04 Teru Kyushu Kk レジスト液吐出装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5977225U (ja) * 1982-11-15 1984-05-25 ソニー株式会社 半導体素子製造装置
JPS6012175A (ja) * 1983-06-30 1985-01-22 Tokyo Denshi Kagaku Kabushiki 塗布液の供給方法
JPS63319078A (ja) * 1987-06-22 1988-12-27 Tokyo Electron Ltd 吐出装置
JPS6464218A (en) * 1987-09-03 1989-03-10 Tokyo Electron Ltd Applicator for resist
JPH01249162A (ja) * 1988-03-30 1989-10-04 Teru Kyushu Kk レジスト液吐出装置

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