JPS5610601B2 - - Google Patents

Info

Publication number
JPS5610601B2
JPS5610601B2 JP1793675A JP1793675A JPS5610601B2 JP S5610601 B2 JPS5610601 B2 JP S5610601B2 JP 1793675 A JP1793675 A JP 1793675A JP 1793675 A JP1793675 A JP 1793675A JP S5610601 B2 JPS5610601 B2 JP S5610601B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1793675A
Other languages
Japanese (ja)
Other versions
JPS5193238A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1793675A priority Critical patent/JPS5193238A/ja
Priority to US05/563,952 priority patent/US3984678A/en
Publication of JPS5193238A publication Critical patent/JPS5193238A/ja
Publication of JPS5610601B2 publication Critical patent/JPS5610601B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Lens Barrels (AREA)
  • Automatic Focus Adjustment (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
JP1793675A 1974-04-05 1975-02-14 Kenbikyono jidoshotensochi Granted JPS5193238A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1793675A JPS5193238A (en) 1975-02-14 1975-02-14 Kenbikyono jidoshotensochi
US05/563,952 US3984678A (en) 1974-04-05 1975-03-31 Apparatus for automatically adjusting a microscope in focus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1793675A JPS5193238A (en) 1975-02-14 1975-02-14 Kenbikyono jidoshotensochi

Publications (2)

Publication Number Publication Date
JPS5193238A JPS5193238A (en) 1976-08-16
JPS5610601B2 true JPS5610601B2 (enExample) 1981-03-09

Family

ID=11957653

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1793675A Granted JPS5193238A (en) 1974-04-05 1975-02-14 Kenbikyono jidoshotensochi

Country Status (1)

Country Link
JP (1) JPS5193238A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5628245B2 (enExample) * 1975-03-19 1981-06-30

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54182B2 (enExample) * 1974-04-05 1979-01-08

Also Published As

Publication number Publication date
JPS5193238A (en) 1976-08-16

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