JPS56103047U - - Google Patents

Info

Publication number
JPS56103047U
JPS56103047U JP18305179U JP18305179U JPS56103047U JP S56103047 U JPS56103047 U JP S56103047U JP 18305179 U JP18305179 U JP 18305179U JP 18305179 U JP18305179 U JP 18305179U JP S56103047 U JPS56103047 U JP S56103047U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18305179U
Other languages
Japanese (ja)
Other versions
JPS6214737Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18305179U priority Critical patent/JPS6214737Y2/ja
Publication of JPS56103047U publication Critical patent/JPS56103047U/ja
Application granted granted Critical
Publication of JPS6214737Y2 publication Critical patent/JPS6214737Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP18305179U 1979-12-31 1979-12-31 Expired JPS6214737Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18305179U JPS6214737Y2 (enExample) 1979-12-31 1979-12-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18305179U JPS6214737Y2 (enExample) 1979-12-31 1979-12-31

Publications (2)

Publication Number Publication Date
JPS56103047U true JPS56103047U (enExample) 1981-08-12
JPS6214737Y2 JPS6214737Y2 (enExample) 1987-04-15

Family

ID=29693362

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18305179U Expired JPS6214737Y2 (enExample) 1979-12-31 1979-12-31

Country Status (1)

Country Link
JP (1) JPS6214737Y2 (enExample)

Also Published As

Publication number Publication date
JPS6214737Y2 (enExample) 1987-04-15

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