JPS5610019A - Monitoring device for automatic inspecting apparatus - Google Patents

Monitoring device for automatic inspecting apparatus

Info

Publication number
JPS5610019A
JPS5610019A JP8414379A JP8414379A JPS5610019A JP S5610019 A JPS5610019 A JP S5610019A JP 8414379 A JP8414379 A JP 8414379A JP 8414379 A JP8414379 A JP 8414379A JP S5610019 A JPS5610019 A JP S5610019A
Authority
JP
Japan
Prior art keywords
monitoring device
inspecting apparatus
automatic inspecting
automatic
monitoring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8414379A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6152610B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Masahide Muraoka
Haruji Eguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP8414379A priority Critical patent/JPS5610019A/ja
Publication of JPS5610019A publication Critical patent/JPS5610019A/ja
Publication of JPS6152610B2 publication Critical patent/JPS6152610B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Emergency Protection Circuit Devices (AREA)
JP8414379A 1979-07-03 1979-07-03 Monitoring device for automatic inspecting apparatus Granted JPS5610019A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8414379A JPS5610019A (en) 1979-07-03 1979-07-03 Monitoring device for automatic inspecting apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8414379A JPS5610019A (en) 1979-07-03 1979-07-03 Monitoring device for automatic inspecting apparatus

Publications (2)

Publication Number Publication Date
JPS5610019A true JPS5610019A (en) 1981-02-02
JPS6152610B2 JPS6152610B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-11-14

Family

ID=13822267

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8414379A Granted JPS5610019A (en) 1979-07-03 1979-07-03 Monitoring device for automatic inspecting apparatus

Country Status (1)

Country Link
JP (1) JPS5610019A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPS6152610B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-11-14

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