JPS5599000U - - Google Patents
Info
- Publication number
- JPS5599000U JPS5599000U JP18228278U JP18228278U JPS5599000U JP S5599000 U JPS5599000 U JP S5599000U JP 18228278 U JP18228278 U JP 18228278U JP 18228278 U JP18228278 U JP 18228278U JP S5599000 U JPS5599000 U JP S5599000U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Details Of Measuring And Other Instruments (AREA)
- Control Of Resistance Heating (AREA)
- Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18228278U JPS6110315Y2 (enExample) | 1978-12-28 | 1978-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18228278U JPS6110315Y2 (enExample) | 1978-12-28 | 1978-12-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5599000U true JPS5599000U (enExample) | 1980-07-09 |
| JPS6110315Y2 JPS6110315Y2 (enExample) | 1986-04-02 |
Family
ID=29193962
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18228278U Expired JPS6110315Y2 (enExample) | 1978-12-28 | 1978-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6110315Y2 (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010045340A (ja) * | 2009-07-10 | 2010-02-25 | Hitachi Kokusai Electric Inc | 半導体製造システム、半導体製造方法、温度制御方法及び温度制御装置 |
| JP2012231145A (ja) * | 2012-05-22 | 2012-11-22 | Hitachi Kokusai Electric Inc | 半導体製造システム、半導体製造方法、温度制御方法、温度制御装置及び半導体製造装置のコントローラ |
-
1978
- 1978-12-28 JP JP18228278U patent/JPS6110315Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010045340A (ja) * | 2009-07-10 | 2010-02-25 | Hitachi Kokusai Electric Inc | 半導体製造システム、半導体製造方法、温度制御方法及び温度制御装置 |
| JP2012231145A (ja) * | 2012-05-22 | 2012-11-22 | Hitachi Kokusai Electric Inc | 半導体製造システム、半導体製造方法、温度制御方法、温度制御装置及び半導体製造装置のコントローラ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6110315Y2 (enExample) | 1986-04-02 |