JPS559581B2 - - Google Patents
Info
- Publication number
- JPS559581B2 JPS559581B2 JP15628175A JP15628175A JPS559581B2 JP S559581 B2 JPS559581 B2 JP S559581B2 JP 15628175 A JP15628175 A JP 15628175A JP 15628175 A JP15628175 A JP 15628175A JP S559581 B2 JPS559581 B2 JP S559581B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Fluid-Damping Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15628175A JPS5279180A (en) | 1975-12-26 | 1975-12-26 | Buffer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15628175A JPS5279180A (en) | 1975-12-26 | 1975-12-26 | Buffer |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5279180A JPS5279180A (en) | 1977-07-04 |
JPS559581B2 true JPS559581B2 (en) | 1980-03-11 |
Family
ID=15624381
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15628175A Granted JPS5279180A (en) | 1975-12-26 | 1975-12-26 | Buffer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5279180A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10718720B2 (en) | 2015-10-07 | 2020-07-21 | Sumco Corporation | Semiconductor wafer evaluation method and semiconductor wafer |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4996176A (en) * | 1973-01-25 | 1974-09-11 |
-
1975
- 1975-12-26 JP JP15628175A patent/JPS5279180A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4996176A (en) * | 1973-01-25 | 1974-09-11 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10718720B2 (en) | 2015-10-07 | 2020-07-21 | Sumco Corporation | Semiconductor wafer evaluation method and semiconductor wafer |
Also Published As
Publication number | Publication date |
---|---|
JPS5279180A (en) | 1977-07-04 |