JPS559460B2 - - Google Patents
Info
- Publication number
- JPS559460B2 JPS559460B2 JP14236575A JP14236575A JPS559460B2 JP S559460 B2 JPS559460 B2 JP S559460B2 JP 14236575 A JP14236575 A JP 14236575A JP 14236575 A JP14236575 A JP 14236575A JP S559460 B2 JPS559460 B2 JP S559460B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14236575A JPS5266883A (en) | 1975-12-02 | 1975-12-02 | Evaporation source for vacuum evaporation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14236575A JPS5266883A (en) | 1975-12-02 | 1975-12-02 | Evaporation source for vacuum evaporation |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5266883A JPS5266883A (en) | 1977-06-02 |
| JPS559460B2 true JPS559460B2 (en) | 1980-03-10 |
Family
ID=15313678
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14236575A Granted JPS5266883A (en) | 1975-12-02 | 1975-12-02 | Evaporation source for vacuum evaporation |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5266883A (en) |
-
1975
- 1975-12-02 JP JP14236575A patent/JPS5266883A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5266883A (en) | 1977-06-02 |