JPS5594041U - - Google Patents
Info
- Publication number
- JPS5594041U JPS5594041U JP17810478U JP17810478U JPS5594041U JP S5594041 U JPS5594041 U JP S5594041U JP 17810478 U JP17810478 U JP 17810478U JP 17810478 U JP17810478 U JP 17810478U JP S5594041 U JPS5594041 U JP S5594041U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17810478U JPS5594041U (en) | 1978-12-25 | 1978-12-25 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17810478U JPS5594041U (en) | 1978-12-25 | 1978-12-25 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5594041U true JPS5594041U (en) | 1980-06-30 |
Family
ID=29188244
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17810478U Pending JPS5594041U (en) | 1978-12-25 | 1978-12-25 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5594041U (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6242431A (en) * | 1986-05-15 | 1987-02-24 | Sony Corp | Processor |
JPH02139948A (en) * | 1988-11-18 | 1990-05-29 | Tel Sagami Ltd | Transfer of substrate |
JPH0629143U (en) * | 1992-09-05 | 1994-04-15 | 九州コマツ電子株式会社 | Wafer loading guide |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5238906B2 (en) * | 1973-01-06 | 1977-10-01 |
-
1978
- 1978-12-25 JP JP17810478U patent/JPS5594041U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5238906B2 (en) * | 1973-01-06 | 1977-10-01 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6242431A (en) * | 1986-05-15 | 1987-02-24 | Sony Corp | Processor |
JPH02139948A (en) * | 1988-11-18 | 1990-05-29 | Tel Sagami Ltd | Transfer of substrate |
JPH0629143U (en) * | 1992-09-05 | 1994-04-15 | 九州コマツ電子株式会社 | Wafer loading guide |